High signal voltage tolerance

Home - Features - High signal voltage tolerance

ESD clamps with high voltage tolerance

Sofics technology has been applied for many different applications. Some applications need I/O that can tolerate a higher voltage.

Examples in different processes

Examples for different process nodes are shown below. This is just a subset of cells proven on silicon and in mass production.

Cells can be ported to other processes. The actual numbers (ESD robustness, leakage, capacitance, area) may vary slightly, also depending on the circuit to be protected, process, voltage level.

Mature CMOS (0.5um to 180nm)

Process Pad ESD robustness Leakage
TSMC 180nm 5V rail > 8 kV HBM < 5 nA
TSMC 180nm 5V I/O > 8 kV HBM < 5 nA
TSMC 180nm 7V I/O > 2 kV HBM < 50 nA
TowerSemi 350nm 4.5V rail > 8 kV HBM < 100 pA

Mainstream CMOS (130nm to 65nm)

Process pad ESD robustness Leakage
TSMC 130nm 5V rail > 3 kV HBM < 1 nA
TSMC 130nm 5V I/O > 3 kV HBM < 1 nA
TSMC 130nm 7V I/O > 4 kV HBM < 1 nA
TSMC 65nm 5V I/O OVT > 4 kV HBM < 1 nA
TSMC 65nm 5V I/O > 4 kV HBM < 100 nA

Advanced CMOS (40nm to 22nm)

Process Pad ESD robustness Leakage
TSMC 40nm 5V rail > 2 kV HBM < 10 nA
TSMC 40nm 5V I/O > 2 kV HBM < 10 nA
TSMC 28nm 3.9V I/O > 2 kV HBM < 50 pA
TSMC 28nm 5.5V I/O > 2 kV HBM < 400 pA
TSMC 28nm 6.5V I/O > 2 kV HBM < 400 pA
TSMC 28nm 12V I/O > 2 kV HBM < 40 nA
UMC 28nm 8.6V I/O > 500V HBM < 1 uA

FinFET technology

Process Pad ESD robustness Leakage
TSMC 16nm 5V rail > 1 kV HBM < 30 nA
TSMC 16nm 5V I/O > 1 kV HBM < 30 nA
TSMC 12nm 3.3V rail > 3 kV HBM < 60 nA
TSMC 12nm 5V I/O > 4 kV HBM < 3 uA
TSMC 7nm 3.3V rail > 2 kV HBM < 1.5 uA
TSMC 5nm 1.8V rail > 1 kV HBM < 500 pA

SOI technology

Process Pad ESD robustness Leakage
GF 22FDX 3.3V rail > 5 kV HBM < 10 pA
GF 22FDX 3.3V I/O > 2 kV HBM < 500 pA
GF 22FDX 5V rail > 4 kV HBM < 10 nA

BiCMOS technology

Process Pad ESD robustness Parasitic capacitance
TSMC 130nm 1.2V I/O > 4 kV HBM < 100 fF
TSMC 130nm 1.2V I/O OVT > 2 kV HBM < 50 fF
UMC 130nm 1.2V I/O > 2 kV HBM < 150 fF
TSMC 90nm 3.3V I/O > 2kV HBM < 100 fF
TSMC 65nm 1.8V I/O > 4 kV HBM < 100 fF
TSMC 65nm 1.0V I/O > 3 kV HBM < 70 fF
GF 65nm 1.2V I/O > 2 kV HBM < 50 fF
GF 65nm 3.3V I/O > 2 kV HBM < 50 fF

Customer quotes

Further reading